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Tantalum Ethoxide


Tantalum ethoxide is a light yellow or colorless liquid. Its main application: tantalum ethoxide can be used to deposit corresponding metal oxide coatings by chemical vapor deposition (CVD), so it is a valuable raw material compound for manufacturing extremely tolerant components used in electronic industry. Tantalum ethanol is the main raw material of DRAM (dynamic random access read / write memory) and SrBi2Ta2O9 ferroelectric thin film coatings. Other applications include coating of electrolytic anode, various powders, semiconductor substrate and tantalum pentoxide for preparing ultrafine powder.


Packing method:

sealed glass bottle.

Physical properties

Molecular formula Ta(OC2H5)5,Ta(OEt)5
Chemical name Tantalum(V) ethoxide, Tantalum pentaethoxide
CAS No. [6074-84-6]
molecular weight 406.25
Appearance and melting point 21℃Light yellow or colorless liquid with melting point of 21 ℃
Density 1.56g/cm3
Degree of polymerization 2.20 (Dissolved in benzene)
viscosity 14.7cSt/30℃ 3.60cSt/100℃ 1.55cSt/160℃
solubility 1600g/1L C2H5OH , 750g/1L THF
boiling point 140 °C (0.1 torr)
Storage Sealed storage under dry inert gas protection (tantalum ethoxide has strong reaction ability to water)

Standard for tantalum alcohol (impurity content / ≤%)

impurity element Tantalum ethoxide
High purity grade 1 High purity grade 2
Nb 0.0030 0.0010
Ti 0.0005 0.0005
W 0.0010 0.0005
Mo 0.0010 0.0005
Cr 0.0010 0.0003
Mn 0.0010 0.0005
Fe 0.0030 0.0005
Ni 0.0010 0.0003
Cu 0.0010 0.0003
Al 0.0010 0.0005
Si 0.0030 0.0008
Cl 0.0200 0.0050
Purity ﹥99.95% ﹥99.98%
appearance colorless liquid
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